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高速变形镜是一种通过实时动态调整镜面曲率来精确校正波前相位畸变的光学器件，是自适应光学（Adaptive Optics, AO）系统的核心部件。它能在毫秒甚至微秒级时间内改变镜面形状，补偿大气湍流、光学系统像差等导致的波前畸变，从而显著提升成像分辨率和光束质量

高速变形镜

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ALPAO大口径高速连续变形镜

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型号DMX37, DMX61, DMX85, DMX121, DMX163
频率400Hz
促动器数量37(DMX37), 61(DMX61), 85(DMX85), 121(DMX121), 163(DMX163)
孔径100mm(DMX37), 130mm(DMX61), 170mm(DMX85), 200mm(DMX121), 240mm(DMX163)
促动器间距20.6
闭环平整度25nm RMS(DMX37), 25nm RMS(DMX61), 25nm RMS(DMX85), 30nm RMS(DMX121), 30nm RMS(DMX163)
波前倾斜变形量30μm PV(DMX37), 50μm PV(其余)
相应时间2ms
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ALPAO模态控制可变形镜

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型号DMM7, DMM8
通道7, 8
孔径mm13.5
平整度Nm RMS30
倾斜补偿形变量 µm PV100
倾斜补偿拟合误差 %2
离焦/像散补偿形变量 µm PV40
离焦/像散补偿拟合误差 %2
球差补偿形变量 µm PV(DMM8)2.5
球差补偿拟合误差 %(DMM8)20
频率150Hz, 200Hz
直径50
长度50
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ALPAO紧凑型变形镜

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型号eDM57-15, eDM69-15, eDM97-15
促动器数量57(eDM57-15), 69(eDM69-15), 97(eDM97-15)
孔径直径 mm9(eDM57-15), 10.5(eDM69-15), 13.5(eDM97-15)
促动器间距 mm1.5
径向促动器数量9(eDM57-15、eDM69-15), 11(eDM97-15)
闭环中镜面最佳平整度 nm RMS7
倾斜变形量μm PV60
离焦/像散变形量μm PV40
三乘三阵列变形量μm PV25
稳定时间 ms at -/+ 10%0.8
镜面薄膜第一谐振频率 Hz800
尺寸55.9×51.5×74mm
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ALPAO自适应闭环软件 & 实时处理系统

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型号ACE fast, ACE
配置既有软件，也包含硬件部分（基于Linux系统的CPU）的自适应光学系统实时运算控制平台(ACE fast), 作为Matlab工具箱的自适应光学软件(ACE)
最高工作频率5K Hz(ACE fast), 1.2K Hz(ACE)
延迟时间150 μs(ACE fast), 1.5 ms(ACE)
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ALPAO高速可变形镜

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型号DM69-08, DM69-15, DM69-25, DM69-50, DM97-08, DM97-15, DM97-25, DM97-50, DM192, DM277, DM308, DM468, DM820, DM3228, DMX37, DMX61, DMX85
磁滞<2%
非线性误差<3%
通道820, 3228, 37, 61, 85, 69, 97, 192, 277, 308, 468
孔径mm5.6(DM69-08), 10.5(DM69-15), 17.5(DM69-25), 35(DM69-50), 7.2(DM97-08), 13.5(DM97-15), 22.5(DM97-25), 45(DM97-50), 21(DM192), 50(DM277), 27(DM308), 33(DM468), 45(DM820), 93(DM3228), 100(DMX37), 130(DMX61), 170(DMX85)
间距mm0.8(DM69-08, DM97-08), 1.5(DM69-15, DM97-15), 2.5(DM69-25, DM97-25), 5(DM69-50, DM97-50), 1.5(DM192, DM308, DM468, DM820, DM3228), 3.1(DM277), 20.6(DMX37, DMX61, DMX85)
闭环平整度nm, RMS7(DM69-08, DM69-15, DM69-25, DM97-08, DM97-15, DM97-25), 25(DM69-50, DM97-50), 7(DM192, DM308, DM468, DM820, DM3228), 15(DM277), 25(DMX37, DMX61, DMX85)
倾斜μm, PV±80(DM69-08, DM97-08), ±60(DM69-15, DM97-15), ±40(DM69-25, DM69-50, DM97-25, DM97-50), ±15(DM192), ±10(DM277), ±15(DM308), ±12(DM468), ±12(DM820), ±10(DM3228), ±30(DMX37), ±50(DMX61, DMX85)
聚焦/散光μm, PV±40(DM69-08, DM69-15, DM97-08, DM97-15), ±30(DM69-25, DM69-50, DM97-25, DM97-50), ±10(DM192, DM277, DM308, DM468, DM820), ±8(DM3228), ±25(DMX37), ±40(DMX61, DMX85)
3×3形变μm, PV±10(DM192, DM277, DM308, DM468, DM820), ±8(DM3228), ±25(其余)
响应ms1.5(DM69-08, DM69-25, DM69-50, DM97-08, DM97-25, DM97-50), 0.8(DM69-15, DM97-15), 0.5(DM192, DM308, DM468, DM820, DM3228), 1(DM277), 2(DMX37, DMX61, DMX85)
带宽Hz400(DM69-08, DM97-08), 800(DM69-15, DM97-15), 600(DM69-25, DM69-50, DM97-25, DM97-50), 2000(DM192), 1100(DM277), 1800(DM308), 1600(DM468, DM820), 1200(DM3228), 400(DMX37, DMX61, DMX85)